Probably you need to check if your user account has same privilege to target process, in other words - if you have to use same user account (which launched target process) to run VTune collection. For example, if you use VTune under "root" user to monitor mysql process which was launched by "mysql" user, it will fail. The solution is to launch mysql process under "root" user.
You can test other running process, to ensure the problem was not caused by other reason, for example, write-permission for result, components are destroyed to re-install the product.
If the problem persists on, you can submit an issue to https://premier.intel.com, with test case or VTune results for investigating in depth.
